[flang] Detect circularly defined procedures

It's possible to define a procedure that has a procedure dummy argument which
names the procedure that contains it.  This was causing the compiler to fall
into an infinite loop when characterizing a call to the procedure.

Following a suggestion from Peter, I fixed this be maintaining a set of
procedure symbols that had already been seen while characterizing a procedure.
This required passing a new parameter to the functions that characterized a
Procedure, a DummyArgument, and a DummyProcedure.

I also added several tests that will crash the compiler without this change.

Differential Revision: https://reviews.llvm.org/D96631