[flang] Fix typos on superscripts.
Original-commit: flang-compiler/f18@c9755c28f06535a5f8fd78ff4a29b1d0a1ee7604 Reviewed-on: https://github.com/flang-compiler/f18/pull/259 Tree-same-pre-rewrite: false
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Original-commit: flang-compiler/f18@c9755c28f06535a5f8fd78ff4a29b1d0a1ee7604 Reviewed-on: https://github.com/flang-compiler/f18/pull/259 Tree-same-pre-rewrite: false